| Furnace | structure | Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner) |
| Heating element | 8 pcs Halogen light tube (D=10 L=300 T =200, mm) |
| Working Temp. | 1100℃max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting) |
| Max heating rate | 50°C/sec |
| Max cooling rate | 64°C/min (Under vacuum: 200 mtorr), 117°C/min (Under atmosphere pressure) |
| Heating zone | 12" length with 4" constant temperature zone within +/-1℃uniformity |
| Program Temp. Controller | 、PID automatic control via SCR (Silicon Controlled Rectifier)power control with phase angle fired, current limiting resistor. 、30 programmable segments for precise control of heating rate, cooling rate anddwell time. 、Please click here to learn why SCR is more accurate than SSC (Solid state relay). 、Built in PID Auto-Tune function with overheating amp; broken thermocouple brokenprotection. 、Over temperature protection and alarm allows for operation without attendant(s). 、+/- 1 ºC temperature accuracy. 、RS485 Communications Port. 、PC Control: º A MTS-02control moduleis included for PC control on this furnace. º The new version of PC module is now compatible with Lab View 05/08/2014 º A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here. |
| Quartz Tube amp; Sample Holder | 、Quartz Tube Size: 4.33" O.Dx4.05" I.D x16.2" Length 、3" diameter Sample holder is inserted to sliding flange, which is made of quartz 、One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia. 、AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area 、The sample holder is removable from flange |
| Vacuum flange | KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement. |
| Water Cooling Jacket | 、Cooling water is required. 、Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. ＜ 25ºC; pressure gt; 25 PSI. 、We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water. Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds. |
| Flow meter | One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min |
| Power input | 208-240 AC, 50/60 Hz single phase, 9 KW Max. (gt; 60A breaker required) |
| HV StationHigh Vacuum Station | Structure | 、Mobile cart size: 600 (L)x600 (W)x700(W), mm 、Max. Loading: 600 Lbs on top 、Molecular pump control Panel : LCD digital 、Diaphragm Pumpand Turbo Molecular Pumpare installed inside the steel case. |
| Vacuum Degree | 6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes) |
| Control panel | 、One button operation- the diaphram pump and the turbo molecular pump will start after pressing "start" button. 、System controlled spining speed- the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber. 、Self protection- the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 、LCD screen- double lines parameters checking interfacemake the working easier to be handled. |
| Start-up time | 2 minutes |
| Backing Pump Volume Flow Rate at 10 mbar | 3.8 L/min for 50Hz and 4.4 L/min for 60Hz |
| Power input | 110V AC or 220V AC switchable, 50/60Hz |
| Power consumption | Duration/Max power: 100/110Watt |
| Shipping Info | Weight and Dimension | RTP furnace: 110 lbs, 760x330x530mm (30"x13"x21" inch) LxWxHHV station: 40 lbs, 600x600x700mm (24"x24"x28") LxWxH |
| Warranty | One year limited warranty with lifetime support(Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.) |
| Laptop, software amp; WiFi Control (Optional) | 、Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. 、 Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters operating range. 、Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. •Note: The software is only compatible with Yudian Temperature Controller |
| Compliance | 、CE Certified 、The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 、Temperature controller is MET and CE Certified 、High Vacuum Station is TUV Certified |
| Application NotesClick here to learnthe installation of a gas regulator | 、Tube furnaces with quartz tubes are designed for using under vacuum and low pressure ＜ 0.2 bar / 3 psi / 0.02 MPa 、Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000℃ 、Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、The flow rate for gases should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tube |
| Operation Instructions | |
